Author/Authors :
O’Keefe، نويسنده , , M.A. and Hetherington، نويسنده , , C.J.D. and Wang، نويسنده , , Y.C. and Nelson، نويسنده , , E.C. and Turner، نويسنده , , J.H. and Kisielowski، نويسنده , , C. and Malm، نويسنده , , J.-O. and Mueller، نويسنده , , R. and Ringnalda، نويسنده , , J. and Pan، نويسنده , , M. and Thust، نويسنده , , A.، نويسنده ,
Abstract :
Sub-إngstrom transmission electron microscopy has been achieved at the National Center for Electron Microscopy (NCEM) by a one-إngstrom microscope (OإM) project using software and enhanced hardware developed within a Brite-Euram project (Ultramicroscopy 64 (1996) 1). The NCEM OإM provides materials scientists with transmission electron microscopy at a resolution better than 1 إ by using extensive image reconstruction to exploit the significantly higher information limit of an FEG-TEM over its Scherzer resolution limit. Reconstruction methods chosen used off-axis holograms and focal series of underfocused images. Measured values of coherence parameters predict an information limit of 0.78 إ. Images from a [1 1 0] diamond test specimen show that sub-إngstrom resolution of 0.89 إ has been achieved with the OإM using focal series reconstruction.
Keywords :
HRTEM , Contrast transfer theory , Exit-wave reconstruction , TEM characterization
