Author/Authors :
Wang، نويسنده , , D and Chen، نويسنده , , H and Li، نويسنده , , F.H and Kawasaki، نويسنده , , K and Oikawa، نويسنده , , T، نويسنده ,
Abstract :
The core structure of a Lomer dislocation in SiGe/Si system has been revealed at atomic level. This is attained by applying the image deconvolution technique in combination with dynamical diffraction effect correction to the high-resolution image taken with a 200 kV field-emission gun high-resolution electron microscope. The Lomer dislocation has a Hornstra-like core. The contrast of the image simulated on the basis of derived atomic configuration is in agreement with that of the experimental image.
Keywords :
High-resolution electron microscopy , Deconvolution , Lomer dislocation , Dynamical diffraction effect correction
