Title of article
Rigid design of fast scanning probe microscopes using finite element analysis
Author/Authors
Kindt، نويسنده , , Johannes H and Fantner، نويسنده , , Georg E and Cutroni، نويسنده , , Jackie A and Hansma، نويسنده , , Paul K، نويسنده ,
Issue Information
دوماهنامه با شماره پیاپی سال 2004
Pages
7
From page
259
To page
265
Abstract
To improve the performance of atomic force microscopes regarding speed and noise sensitivity, it is important to consider the mechanical rigidity of the actuator (scanner), and the overall mechanical structure. Using finite element analysis in the design process, it was possible to increase the first resonance frequency from 950 Hz for the whole system to 23.4 kHz for the whole system. This constitutes a factor of ∼25 in resonance frequency and a factor of 625 in stiffness and, hence, noise immunity.
Keywords
AFM , Fast scanning probe microscope , Rigid design , Piezoscanner , Piezostack , Finite element analysis , FEA
Journal title
Ultramicroscopy
Serial Year
2004
Journal title
Ultramicroscopy
Record number
2156194
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