Author/Authors :
Fonseca، نويسنده , , L. and Pérez-Murano، نويسنده , , F. and Calaza، نويسنده , , C. and Rubio، نويسنده , , R. and Santander، نويسنده , ,
J. To-Figueras، نويسنده , , E. and Gracia، نويسنده , , I. and Cané، نويسنده , , C. and Moreno، نويسنده , , M. and Marco، نويسنده , , S.، نويسنده ,
Abstract :
In this work, an atomic force microscope (AFM) with an integrated thermal sensor has been used to obtain the local spatial distribution of temperatures in a micromachined thermopile with submicron resolution. In this communication, we will show how the dimensional, structural and functional characteristics of a thermopile suits well with the requirements for AFM thermal imaging, and how a deeper insight of the thermopile operation can be gained with the aid of these advanced scanning probe-based tools.
Keywords :
atomic force microscopy , Thermal probing , Micromechanical devices , Thermopiles
