Method to detect the property of complex oxide structure formed by AFM anodic oxidation completely

Thin titanium film (3∼8 nm thick) can be oxidized completely with atomic force microscope anodic oxidation to form a metal–insulator–metal structure to fabricate various nanodevices. Whether the Ti film is oxidized down to the bottom is vital to the nanodevices. We have fabricated a delicate Ti oxide structure of two triangles on about 3 nm thick Ti film. The theoretical calculation of the ratio of h ox / d Ti = 0.58 indicates the Ti film has been oxidized completely.