Crystal structure refinement using Bloch-wave method for precession electron diffraction

Procedure for crystal structure refinement using precession electron diffraction data and Bloch-wave method for accounting multibeam scattering is described. Refinement procedure takes into account features of precession geometry. Refining model consists of structural and reduced parameters determining dynamic diffraction. Difference between measured and calculated dynamic intensities of reflections is minimized with application of a nonlinear least squares method. As test example we used Si single nanocrystals. The influence of the reduced parameters on the quality of the obtained model is discussed. Refinement procedure is a part of ASTRA software.