Title of article
Analysis of nanocrystalline films on rough substrates
Author/Authors
Cimalla، نويسنده , , V. and Machleidt، نويسنده , , T. and Spieك، نويسنده , , L. and Gubisch، نويسنده , , M. and Hotovy، نويسنده , , I. and Romanus، نويسنده , , H. and Ambacher، نويسنده , , O.، نويسنده ,
Issue Information
دوماهنامه با شماره پیاپی سال 2007
Pages
6
From page
989
To page
994
Abstract
In this work, we propose a method to estimate basic parameters like the rms roughness and the mean grain size of nanocrystalline thin films on rough substrates. The method is based on the analysis of the power spectral density (PSD) of the surface profile, which allows distinguishing between the two participating components from surface and film. The effectiveness will be demonstrated for thin NiOx layers for gas sensing on Al2O3 ceramic substrates, and for protective WC coatings on steel.
Keywords
Nanocrystalline films , Thin films
Journal title
Ultramicroscopy
Serial Year
2007
Journal title
Ultramicroscopy
Record number
2157026
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