Author/Authors :
Jiao، نويسنده , , Zheng-Su Wan، نويسنده , , Xiaojuan and Guo، نويسنده , , Huijiao and Wang، نويسنده , , Jia and Zhao، نويسنده , , Bing and Wu، نويسنده , , Minghong، نويسنده ,
Abstract :
Lead zirconate titanate (PZT) films have been extensively investigated for many applications: the nonvolatile memory devices based on their remarkable ferroelectric properties, the microelectromechanical system (MEMS) based on their piezoelectricity as well in sensors as in actuators. In this paper, we inject charges into PZT thin films, and then the charge storage and transportation through PZT thin films were observed by electric force microscopy (EFM). Results were studied and charging mechanisms were proposed.
Keywords :
Lead zirconate titanate (PZT) , Electric force microscopy (EFM) , charge storage , Thin film
