Author/Authors :
Kuramochi، نويسنده , , Koji and Yamazaki، نويسنده , , Takashi and Kotaka، نويسنده , , Yasutoshi and Ohtsuka، نويسنده , , Masahiro and Hashimoto، نويسنده , , Iwao and Watanabe، نويسنده , , Kazuto، نويسنده ,
Abstract :
The effect of the chromatic aberration ( C c ) coefficient in a spherical aberration ( C s ) - corrected electromagnetic lens on high-resolution high-angle annular dark field (HAADF) scanning transmission electron microscope (STEM) images is explored in detail. A new method for precise determination of the C c coefficient is demonstrated, requiring measurement of an atomic-resolution one-frame through-focal HAADF STEM image. This method is robust with respect to instrumental drift, sample thickness, all lens parameters except C c , and experimental noise. It is also demonstrated that semi-quantitative structural analysis on the nanometer scale can be achieved by comparing experimental C s - corrected HAADF STEM images with their corresponding simulated images when the effects of the C c coefficient and spatial incoherence are included.
