Author/Authors :
Ho Kahng، نويسنده , , Yung Hyun Choi، نويسنده , , Jinho and Jeong، نويسنده , , Kwanghoon and Chon Park، نويسنده , , Byong and Kim، نويسنده , , Dal-Hyun and Lyou، نويسنده , , Joon and Lee، نويسنده , , Jae-Joon and Lee، نويسنده , , Haiwon and Lee، نويسنده , , Takhee and Jung Ahn، نويسنده , , Sang، نويسنده ,
Abstract :
Ball-shaped atomic force microscope (AFM) tips (ball tips) are useful in AFM metrology, particularly in critical dimension AFM metrology and in micro-tribology. However, a systematic fabrication method for nano-scale ball tips has not been reported. We report that nano-scale ball tips can be fabricated by ion-beam-induced deposition (IBID) of Pt at the free end of multiwall carbon nanotubes that are attached to AFM tips. Scanning electron microscopy and transmission electron microscopy analyses were done on the Pt ball tips produced by IBID in this manner, using ranges of Ga ion beam conditions. The Pt ball tips produced consisted of aggregated Pt nano-particles and were found to be strong enough for AFM imaging.
