Title of article
Energy selective scanning electron microscopy to reduce the effect of contamination layers on scanning electron microscope dopant mapping
Author/Authors
Rodenburg، نويسنده , , C. and Jepson، نويسنده , , M.A.E. and Bosch، نويسنده , , E.G.T. and Dapor، نويسنده , , M.، نويسنده ,
Issue Information
دوماهنامه با شماره پیاپی سال 2010
Pages
7
From page
1185
To page
1191
Abstract
We demonstrate that energy selective scanning electron microscopy can lead to substantial dopant contrast and resolution improvements (compared to standard SEM) when the energy selection is carried out based on Monte Carlo modelled secondary electron spectra in combination with detector transfer modelling.
Keywords
Energy selective SEM , Detector transfer modelling , Silicon , Dopant mapping
Journal title
Ultramicroscopy
Serial Year
2010
Journal title
Ultramicroscopy
Record number
2158013
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