Quantitative atom probe analyses of rare-earth-doped ceria by femtosecond pulsed laser

We have investigated the irradiation conditions of femtosecond laser pulses for quantitative atom probe analyses of rare-earth (RE) doped ceria. The influence of laser wavelength, power, pulse frequency, as well as specimen temperature on mass resolution and background noise of atom probe mass spectra were investigated. Furthermore, quantitative atom probe analysis of yttrium distribution in Y-doped ceria was carried out with the optimized evaporation conditions. The distribution of yttrium was found to be uniform within the grains, but they were confirmed to be segregated at grain boundaries.