• Title of article

    Optimal laser positioning for laser-assisted atom probe tomography

  • Author/Authors

    Koelling، نويسنده , , S. and Innocenti، نويسنده , , N. and Bogdanowicz، نويسنده , , J. and Vandervorst، نويسنده , , W.، نويسنده ,

  • Issue Information
    دوماهنامه با شماره پیاپی سال 2013
  • Pages
    5
  • From page
    70
  • To page
    74
  • Abstract
    Laser-assisted atom probe tomography is a material analysis method based on field evaporating ions from a tip-shaped sample by a combination of a standing electric field and a short (pico- or femtosecond) laser pulse. The laser-pulse thereby acts as a starting signal for a time-of-flight mass analysis of the ions whereby the thermal energy deposited in the tip by the laser pulse temporarily enables the evaporation of ions from the surface of the tip. Here we will use simulations of the laser absorption on a silicon tip to find the optimal position of the laser spot in order to maximize the mass resolution achieved during the experiments. We will confirm our simulations by showing that the experimentally observed mass resolution indeed changes as predicted by the simulations.
  • Keywords
    Laser-assisted atom probe , Laser-tip interaction , Silicon
  • Journal title
    Ultramicroscopy
  • Serial Year
    2013
  • Journal title
    Ultramicroscopy
  • Record number

    2159017