Author/Authors :
Okuno، نويسنده , , Shoji and Ikeda، نويسنده , , Hirokazu and Saitoh، نويسنده , , Yutaka and Akamine، نويسنده , , Tadao and Inoue، نويسنده , , Masahiro and Yamanaka، نويسنده , , Junko and Kadoi، نويسنده , , Kiyoaki and Kojima، نويسنده , , Yoshikazu and Miyahara، نويسنده , , Shin-ichi and Kamiya، نويسنده , , Masaaki، نويسنده ,
Abstract :
A semi-empirical model for an ONO-stacked insulator film is presented together with its implications. The model covers ONO, ON, and NO films as well as single-layered SiO2 and Si3N4. We eventually present an assessment for estimating the lifetime of an ONO-stacked insulator film for a given configuration.
