Large-area beryllium metal foils

To manufacture beryllium filters having diameters up to 82 mm and thicknesses in the range 0.1–1 μm, it was necessary to construct apparatus in which the metal could safely be evaporated, and then to find an acceptable substrate and evaporation procedure. The metal was evaporated resistively from a tantalum dimple boat mounted in a baffled enclosure that could be placed in a conventional vacuum bell jar, obviating the need for a dedicated complete vacuum system. Substrates were 102 mm × 127 mm × 0.05 mm cleaved mica sheets, coated with 0.1 μm of NaCl, then with approximately 50 μg/cm2 of cellulose nitrate. These were mounted on poly(methyl methacrylate) sheets 3 mm thick that were in turn clamped to a massive aluminum block for thermal stability. Details of the processes for evaporation, float off, and mounting are given, and the resulting foils described.