Title of article :
Carbon stripper foil preparation by ion beam sputtering with 3.5 keV Kr ions
Author/Authors :
Sugai، نويسنده , , I and Oyaizu، نويسنده , , M and Kawakami، نويسنده , , H and Hattori، نويسنده , , T and Tomizawa، نويسنده , , H and Kawasaki، نويسنده , , K، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1997
Abstract :
Heavy ion-beam sputtering with low beam voltage was found to be applicable for the preparation of long-lived carbon stripper foils. A test foil (25 μg/cm2) made by this method survived an integrated ion current of 6213 mC/cm2 corresponding a lifetime of about 200 times the best commercially available foil made by evaporation-condensation. The present method can be expected to be applicable to magnetron sputtering for mass production of carbon stripper foils.
Keywords :
sputtering , Stripper lifetime , Carbon stripper , Vacuum deposition , Electron diffraction , Purity of target
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
