• Title of article

    Capacitive sensor of absolute coordinate

  • Author/Authors

    Madorsky، نويسنده , , A.V. and Repkov، نويسنده , , V.V.، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 1998
  • Pages
    3
  • From page
    279
  • To page
    281
  • Abstract
    A capacitive sensor of absolute coordinate with 100 mm range, 10 μm accuracy and 1 μm resolution has been developed. The measuring structure is manufactured using standard Printed Circuit Board Technology.
  • Journal title
    Nuclear Instruments and Methods in Physics Research Section A
  • Serial Year
    1998
  • Journal title
    Nuclear Instruments and Methods in Physics Research Section A
  • Record number

    2177400