Title of article :
Capacitive sensor of absolute coordinate
Author/Authors :
Madorsky، نويسنده , , A.V. and Repkov، نويسنده , , V.V.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1998
Abstract :
A capacitive sensor of absolute coordinate with 100 mm range, 10 μm accuracy and 1 μm resolution has been developed. The measuring structure is manufactured using standard Printed Circuit Board Technology.
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
