Title of article
Capacitive sensor of absolute coordinate
Author/Authors
Madorsky، نويسنده , , A.V. and Repkov، نويسنده , , V.V.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1998
Pages
3
From page
279
To page
281
Abstract
A capacitive sensor of absolute coordinate with 100 mm range, 10 μm accuracy and 1 μm resolution has been developed. The measuring structure is manufactured using standard Printed Circuit Board Technology.
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
1998
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2177400
Link To Document