Title of article
Coulomb interactions in a focused ion beam column and design guidelines for an experimental system: comparison of results from MONTEC and BOERSCH
Author/Authors
Didenko، نويسنده , , L and Guharay، نويسنده , , S.K and Orloff، نويسنده , , R.L. and Melngailis، نويسنده , , J، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1999
Pages
5
From page
121
To page
125
Abstract
We have made a comparison of the MONTEC® and BOERSCH® codes that are used to determine the space-charge properties of focused beams. The codes were compared by analyzing a focused ion beam system with a liquid metal ion source. The results for the statistical broadening of the ion beam were quite similar, but there were some differences when taking into account global space charge and lens aberrations.
Keywords
Focused ion beam , Space-charge effects , Comparison of MONTEC® and BOERSCH®
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
1999
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2181171
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