Title of article
Study of properties of irradiated PMMA by the method of thin sections
Author/Authors
M.B. El-Kholi، نويسنده , , A and Mohr، نويسنده , , J and Nazmov، نويسنده , , V، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2000
Pages
4
From page
497
To page
500
Abstract
In deep-etch X-ray lithography while specific absorption dose changes with depth of PMMA layer. Properties of PMMA material change more quickly with depth. Mean molecular weight, mean molecular number and glass transition temperature versus absorption dose up to 20 kJ/cm3 were investigated.
Keywords
melting point , Mean molecular weight , poly(methyl methacrylate) , Synchrotron radiation
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
2000
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2186802
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