Title of article :
Study of properties of irradiated PMMA by the method of thin sections
Author/Authors :
M.B. El-Kholi، نويسنده , , A and Mohr، نويسنده , , J and Nazmov، نويسنده , , V، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2000
Abstract :
In deep-etch X-ray lithography while specific absorption dose changes with depth of PMMA layer. Properties of PMMA material change more quickly with depth. Mean molecular weight, mean molecular number and glass transition temperature versus absorption dose up to 20 kJ/cm3 were investigated.
Keywords :
melting point , Mean molecular weight , poly(methyl methacrylate) , Synchrotron radiation
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
