X-ray tomography for the ATLAS semi-conductor tracker

Results are presented of precision tests with the prototype of an X-ray tomography system for measuring the two-dimensional position of silicon strip modules on barrel structures. The measured accuracy and repeatability are better than 6 μm in rφ and better than 30 μm in r, where r and φ are polar coordinates, and are sufficient for a high-precision survey of the barrels of the ATLAS semi-conductor tracker.