Title of article :
Fabrication of ATLAS pixel detector prototypes at IRST
Author/Authors :
Boscardin، نويسنده , , M. Francesca Betta، نويسنده , , G.-F.Dalla and Gregori، نويسنده , , P. and Zen، نويسنده , , M. and Zorzi، نويسنده , , N.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2001
Abstract :
We report on the development of a fabrication technology for n-on-n silicon pixel detectors oriented to the ATLAS experiment at LHC. The main processing issues and some selected results from the electrical characterization of detector prototypes and related test structures are presented and discussed.
Keywords :
Silicon pixel detectors , Electrical characterization , Fabrication technology
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
