Title of article
Beam line BL11 for LIGA process at the NewSUBARU
Author/Authors
Mekaru، نويسنده , , Harutaka and Utsumi، نويسنده , , Yuichi and Hattori، نويسنده , , Tadashi، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
4
From page
741
To page
744
Abstract
A beam line BL11 is constructed for exposure Hard X-ray Lithography (HXL) in the LIGA (German acronym for Lithographite Galvanoformung and Abformung) process at the synchrotron radiation (SR) facility NewSUBARU of the Laboratory of Advanced Science and Technology for Industry (LASTI) in Himeji Institute of Technology (HIT). This beam line was designed by the criteria; photon energy range 4–6 keV, a beam spot size on the exposure stage ⩾60×5 mm2, a density of total irradiated photons ⩾1011 photons/cm2. The PMMA sheet etching was successfully demonstrated by using the output beam. We conclude that this beam line performs sufficiently well to study the exposure of HXL in the LIGA process.
Keywords
HXL , Synchrotron radiation , Micromachining , PMMA , Multilayered-mirror , LIGA
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
2001
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2192126
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