Author/Authors :
Lee، نويسنده , , J.C. and Ueng، نويسنده , , T.S. and Chen، نويسنده , , J.R. and Hsu، نويسنده , , Y.J. and Hsiung، نويسنده , , G.Y. and Lin، نويسنده , , T.F. and Chang، نويسنده , , S.H. and Hsu، نويسنده , , S.N. and Wang، نويسنده , , D.J.، نويسنده ,
Abstract :
A gas filter system is designed for the high flux beam line at SRRC to reduce the intensity of the high order contamination to <10−4. To reach a pressure of <1×10−8 Torr at the front end and the end station, a differential pumping system is adopted. The differential pumping system contains special vacuum chambers and turbo molecular pumps along the photon beam path. The specially designed vacuum chamber has a larger inner cross section varied from 118 mm×22 mm to 109 mm×42 mm. In order to reduce the extra ordinary large conductance, while keeping the high photon flux, the inner cross section of the chamber is divided into 22 channels which are separated by a 0.3 mm thin wall in between channels. The prototype chambers have been fabricated and tested. The testing results show that the designed goal was achieved. However, the gas pressure in viscous flow was higher than expected. A new chamber is designed for better results. The results of several designs and tests are described and discussed in this paper.
