Performance of soft X-ray emission spectrometer employing charge-coupled device detector

The performance of a soft X-ray emission spectrometer employing a charge-coupled device camera was examined in the energy range of 80–1250 eV. The spectra observed by low-energy electron irradiation for metal L, oxygen K and silicon L lines were in good agreement with the previous observations by conventional MCP detectors. The results suggest that the energy resolution is good enough for the resonant excitation spectroscopy by synchrotron radiation as well.