Title of article
X-ray nanofocusing using a piezoelectric deformable mirror and at-wavelength metrology methods
Author/Authors
Nakamori، نويسنده , , Hiroki and Matsuyama، نويسنده , , Satoshi and Imai، نويسنده , , Shota and Kimura، نويسنده , , Takashi and Sano، نويسنده , , Yasuhisa and Kohmura، نويسنده , , Yoshiki and Tamasaku، نويسنده , , Kenji and Yabashi، نويسنده , , Makina and Ishikawa، نويسنده , , Tetsuya and Yamauchi، نويسنده , , Kazuto، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2013
Pages
5
From page
93
To page
97
Abstract
An adaptive X-ray mirror with shape controllability in a spatial wavelength range longer than 20 mm was developed, and we demonstrated its shape generation and focusing performance characteristics. The shape accuracy in a spatial wavelength range shorter than 20 mm, which cannot be adaptively figured, was controlled in advance offline. A pencil beam method for measuring the slope error and a phase retrieval method for precisely estimating the wavefront error were employed for online shape correction. A focal spot size of 120 nm, which is diffraction-limited, was realized, and the shape accuracy obtained nearly satisfied Rayleighʹs quarter-wavelength criterion.
Keywords
Hard X-ray focusing , deformable mirror
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
2013
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2193902
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