Title of article
Ion beam etching of a flat silicon mirror surface: A study of the shape error evolution
Author/Authors
Preda، نويسنده , , I. and Vivo، نويسنده , , A. and Demarcq، نويسنده , , F. and Berujon، نويسنده , , S. and Susini، نويسنده , , J. and Ziegler، نويسنده , , E.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2013
Pages
3
From page
98
To page
100
Abstract
An ion beam etching process has been developed to improve the flatness of an X-ray mirror surface. The basic principle consists of moving a mirror at variable and controlled speed under an ion beam whose erosion capability was thoroughly characterized beforehand. At every step of the polishing procedure, several metrology measurements are applied to assess both mirror figure and finish. Two flat-shaped mirrors were produced to demonstrate the capability of the approach. The residual slope error was measured to be of 70 nrad over a mirror length of 70 mm while the root mean roughness remained statistically unaffected.
Keywords
Ion beam figuring , focusing , X-ray optics , X-Ray mirror
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
2013
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2193904
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