Process control strategy of the silicon sensors production for the CMS tracker

In the framework of the CMS experiment, a quality control of the silicon sensors production has been developed for the tracker construction. The emphasis here is on the process stability control based on the characterization of test-structures made of eight different components. The measurements carried out are presented. Then the set-up and the software developed for this purpose are explained. The first results, including the ones obtained on faulty batches of sensors, are shown.