Title of article
Fabrication and test of Superconducting Single Photon Detectors
Author/Authors
Leoni، نويسنده , , R. C. Mattioli، نويسنده , , F. and Castellano، نويسنده , , M.G. and Cibella، نويسنده , , S. and Carelli، نويسنده , , P. and Pagano، نويسنده , , S. and Perez de Lara، نويسنده , , D. and Ejrnaes، نويسنده , , M. and Lisitskyi، نويسنده , , M.P. and Esposito، نويسنده , , E. and Cristiano، نويسنده , , R. and Nappi، نويسنده , , C.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2006
Pages
3
From page
564
To page
566
Abstract
We report here on the state of our fabrication process for Superconducting Single Photon Detectors (SSPDs). We have fabricated submicrometer SSPD structures by electron beam lithography using very thin (10 nm) NbN films deposited by DC-magnetron sputtering on different substrates and at room substrate temperature. The structures show a fast optical response (risetime <500 ps limited by readout electronics) and interesting self-resetting features.
Keywords
Single photon detectors , Electron beam lithography , Superconducting thin-film nanostructures
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
2006
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2200112
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