Title of article
An off-axis multi-channel analyzer for secondary electrons
Author/Authors
Kienle، نويسنده , , M. and Plies، نويسنده , , E.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2004
Pages
6
From page
325
To page
330
Abstract
The design, simulation and test of a new dispersive multi-channel analyzer are presented. Owing to the experimental voltage resolution of 50 mV and a spectrometer constant of 5.6×10−8 VA1/2s1/2 this analyzer is very well suited for voltage measurements in integrated circuits. The analyzer can also be used advantageously for a complete separation of secondary and backscattered electrons in the imaging mode. The parallel detection of a 20 eV band width of the secondary electron spectrum may be used in the future to attain characteristic material information at low primary electron energies <2 keV.
Keywords
Multi-channel analyzer , E-beam testing , Electron spectroscopy , SEM , Wien-filter separator , Voltage measurements , Electron optics
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
2004
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2201471
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