Author/Authors :
Hilton، نويسنده , , G.C. and Beall، نويسنده , , J.A. and Deiker، نويسنده , , S and Vale، نويسنده , , L.R and Doriese، نويسنده , , W.B and Beyer، نويسنده , , Jِrn and Ullom، نويسنده , , J.N and Reintsema، نويسنده , , C.D and Xu، نويسنده , , Y and Irwin، نويسنده , , K.D، نويسنده ,
Abstract :
We are developing arrays of Mo/Cu transition edge sensor-based detectors for use as X-ray microcalorimeters and sub-millimeter bolometers. We have fabricated 8×8 pixel X-ray microcalorimeter arrays using surface micromachining. Surface-micromachining techniques hold the promise of scalability to much larger arrays and may allow for the integration of in-plane multiplexer elements. In this paper we describe the surface micromachining process and recent improvements in the device geometry that provide for increased mechanical strength. We also present X-ray and heat pulse spectra collected using these detectors.
