Title of article
Fabrication of multi-pixel TES microcalorimeters with an electrodeposited Sn absorber and Bi absorber
Author/Authors
Arakawa، نويسنده , , T. and Kudo، نويسنده , , H. and Sato، نويسنده , , H. and Kobayashi، نويسنده , , H. and Izumi، نويسنده , , T. and Ohtsuka، نويسنده , , S. and Mori، نويسنده , , K. and Shoji، نويسنده , , S. and Osaka، نويسنده , , T. and Homma، نويسنده , , T. and Mitsuda، نويسنده , , K. and Yamasaki، نويسنده , , N. and Fujimoto، نويسنده , , R. and Iyomoto، نويسنده , , N. and Oshima، نويسنده , , T. and Futamoto، نويسنده , , K. and Takei، نويسنده , , Y. and Ichitsubo، نويسنده , , T. and Fujimori، نويسنده , , T. and Yoshida، نويسنده , , K. and Ishisaki، نويسنده , , Y. and Morita، نويسنده , , U. and Koga، نويسنده , , T. and Shinozaki، نويسنده , , K. and Sato، نويسنده , , K. and Takai، نويسنده , , N. and Ohashi، نويسنده , , T. and Kuroda، نويسنده , , Y. and Onishi، نويسنده , , M. and Goto، نويسنده , , M. and Beppu، نويسنده , , F.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2004
Pages
4
From page
456
To page
459
Abstract
We have developed multi-pixel TES microcalorimeters in order to realize high-energy resolution and X-ray imaging. A Sn absorber and a Bi absorber were formed on Si3N4 and SiO2 membrane using two-step exposure photolithography and electrodeposition. A FEM analysis was carried out to investigate the performance of the X-ray microabsorbers. In addition, a superconducting through-wafer interconnection was demonstrated considering the future X-ray imager using microcalorimeters. Detail of the fabrication techniques, characteristics and simulation results of two types of the microabsorbers, as well as those of the calorimeters are described.
Keywords
Bi absorber , Sn absorber , Calorimeter , FEM analysis
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
2004
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2201966
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