Fabrication of antenna-coupled transition edge polarization-sensitive bolometer arrays

We have fabricated antenna-coupled superconducting transition edge sensor (TES) arrays for far-infrared and millimeter-wave applications. The advantage of antenna coupling is that the large optical coupling structure required for far-infrared/millimeter wavelengths is not thermally active. The sensor can thus be as small as lithographic techniques permit. By eliminating large absorbers, this technology enables bolometers working at frequencies as low as 30 GHz, covering the entire spectral region of interest for future space-borne studies of cosmic microwave background polarization. We developed a focal plane architecture with dual-polarization sensitivity in a single spectral band, or single-polarization sensitivity in multiple spectral bands. We use TES layers consisting of Al/Ti/Au/Ti thin films and Nb electrical contacts on a low-stress Si3N4 membrane.