Title of article
Multielement X-ray row detector on GaAs with spatial resolution of 108 μm
Author/Authors
Dvoryankin، نويسنده , , V.F. and Dikaev، نويسنده , , Yu.M. and Krikunov، نويسنده , , A.I. and Panova، نويسنده , , T.M. and Telegin، نويسنده , , A.A.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2004
Pages
2
From page
87
To page
88
Abstract
The multielement X-ray row detector with pitch of 108 μm was made on epitaxial GaAs (p+–n–n′–n+) structures by isotropic etching in solution HCl–KBrO3–H2O. Separation of signals from the near-by detectors is achieved by built-in guard ring on each pixel. The spatial response of the detectors was evaluated.
Keywords
detector , RESOLUTION , Guard ring , Chemical etching , GaAS , X-Ray
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
2004
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2203867
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