Author/Authors :
Ezoe، نويسنده , , Y. and Koshiishi، نويسنده , , M. and Mita، نويسنده , , M. and Mitsuda، نويسنده , , K. and Hoshino، نويسنده , , A. and Ishisaki، نويسنده , , Y. and Takano، نويسنده , , T. and Maeda، نويسنده , , R.، نويسنده ,
Abstract :
We present our development of novel light-weight and low-cost micro-pore X-ray optics based on the Micro Electro Mechanical Systems (MEMS) technologies. We successfully fabricated X-ray mirror chips with surface roughness less than several nm and an accurately defined optic mount. Our studies suggest this type of optics is a promising device for X-ray optics in many research fields such as space research, nuclear physics, and microanalysis.
