Title of article :
The Wien filter: History, fundamentals and modern applications
Author/Authors :
Plies، نويسنده , , E. and Marianowski، نويسنده , , K. and Ohnweiler، نويسنده , , T.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2011
Pages :
5
From page :
7
To page :
11
Abstract :
Many references on historic and modern papers dealing with the Wien filter are given. Basic optic properties, advantages and disadvantages as well as applications are summarized. Then uncommon systems consisting of Wien filters with different azimuthal orientations, i.e. orthogonal deflection sections, are considered. The corresponding paraxial ray equation and the eight fundamental trajectories of such systems are introduced and the computation of the aberrations up to the third rank is briefly covered. As an example an electron monochromator with four Wien filters is discussed in detail. Finally, a novel mass separator with two Wien filters for a low-voltage focussed ion beam column with a liquid metal ion source is treated.
Keywords :
WIEN filter , Electron optics , Ion Optics , Electron monochromator , Mass separator , SEM , FIB
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Serial Year :
2011
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Record number :
2208480
Link To Document :
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