Parallel acquisition electrostatic electron energy analyzers for high throughput nano-analysis

Main design points and measurement results from an electron energy analyzer capable of simultaneous spectral acquisition over a wide energy range are presented. This analyzer has been first applied in the field of Auger electron spectroscopy, where we demonstrate the capability of fast data acquisition at high vacuum, that in turn can enable applications in semiconductor inspection and in the usual SEM environments. Steps for further improvement of the transmission and acquisition speed are highlighted.