Optical measurement of thermal deformation of multilayer optics under synchrotron radiation

An in situ optical technique to visualize surface distortions of the first monochromator crystal under synchrotron beam heat loading has been developed and applied to measure surface profiles of multilayer optics under white wiggler beam at the CHESS A2 beamline. Two identical multilayer structures deposited on Si and SiC substrates have been tested. Comparison of the reconstructed 3D heatbump profiles showed the surface distortions of the multilayer on SiC a factor of two smaller than the same multilayer on a Si substrate.