Title of article :
Autocollimators for deflectometry: Current status and future progress
Author/Authors :
Geckeler، نويسنده , , Ralf D. and Just، نويسنده , , Andreas and Krause، نويسنده , , Michael and Yashchuk، نويسنده , , Valeriy V.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2010
Abstract :
The proliferation of autocollimator-based surface profilometers at synchrotron metrology laboratories worldwide necessitates a detailed understanding of the parameters influencing their angular response. A comprehensive overview of the current status of autocollimator characterization and calibration at the Physikalisch-Technische Bundesanstalt (PTB) and its implications for their optimal application are provided. Present and future challenges to angle metrology posed by autocollimator-based surface profilometers will be delineated, and solutions and expected progress to meet them will be outlined.
Keywords :
Topography measurement , Precision metrology , Autocollimator , Angle calibration , Angle , Traceability
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Journal title :
Nuclear Instruments and Methods in Physics Research Section A