Author/Authors :
Handa، نويسنده , , Soichiro and Kimura، نويسنده , , Takashi and Mimura، نويسنده , , Hidekazu and Yumoto، نويسنده , , Hirokatsu and Matsuyama، نويسنده , , Satoshi and Sano، نويسنده , , Yasuhisa and Tamasaku، نويسنده , , Kenji and Nishino، نويسنده , , Yoshinori and Yabashi، نويسنده , , Makina and Ishikawa، نويسنده , , Tetsuya and Yamauchi، نويسنده , , Kazuto، نويسنده ,
Abstract :
We describe a method for characterizing sub-10-nm X-ray beams using knife-edge scanning with dark-field geometry. Beam profile measurement by the conventional dark-field method is simulated numerically, and the signal intensity is found to depend strongly on the incident angle of the beam components. A numerical procedure to correct the dependence and to determine the actual beam profile is presented.
