Title of article
Vibration of cantilevers with rough surfaces
Author/Authors
Duan، نويسنده , , Huiling and Xue، نويسنده , , Yahui and Yi، نويسنده , , Xin، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2009
Pages
5
From page
550
To page
554
Abstract
We study the effect of surface roughness on the resonance frequency of micro-cantilever sensors. The analysis demonstrates that surface roughness can enhance, decrease or even annul the effect of surface stress on the resonance frequency, depending on the surface inclination angle and the Poisson ratio of the coating film on the cantilever.
Keywords
Surface stress , Surface roughness , micro-cantilevers , Resonance frequency
Journal title
Acta Mechanica Solida Sinica
Serial Year
2009
Journal title
Acta Mechanica Solida Sinica
Record number
2227927
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