• Title of article

    Vibration of cantilevers with rough surfaces

  • Author/Authors

    Duan، نويسنده , , Huiling and Xue، نويسنده , , Yahui and Yi، نويسنده , , Xin، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2009
  • Pages
    5
  • From page
    550
  • To page
    554
  • Abstract
    We study the effect of surface roughness on the resonance frequency of micro-cantilever sensors. The analysis demonstrates that surface roughness can enhance, decrease or even annul the effect of surface stress on the resonance frequency, depending on the surface inclination angle and the Poisson ratio of the coating film on the cantilever.
  • Keywords
    Surface stress , Surface roughness , micro-cantilevers , Resonance frequency
  • Journal title
    Acta Mechanica Solida Sinica
  • Serial Year
    2009
  • Journal title
    Acta Mechanica Solida Sinica
  • Record number

    2227927