Silicon Standards for Assessment and Calibration of Stylus Probes

When using tactile instruments the representation of the extracted surface profile is influenced by the properties and the state of the stylus probe. It will be shown that monocrystalline silicon is an excellent material for standards and tools to assess the stylus probe properties. Very precise structures can be realised by etching. A set of silicon standards will be presented. Furthermore, the results of investigations concerning the detection of the shape of the stylus tip, the measurement of the stylus force and the correction of profiles which are distorted by the circular movement of the stylus arm will be discussed.