UV-laser assisted Fabrication of integrated-optical Waveguides

By UV-laser-irradiation a controllable change of the refractive index of some polymers can be attained in the irradiated zone. The detailed UV-photon-induced process mechanisms have been investigated on the basis of PMMA employed as an UV-modifiable model polymer. By mask lithographic methods the UV-laser-assisted technology for the modification of the polymer optical properties enables the local increase of the refractive index and thus the fabrication of integrated-optical waveguiding elements in the surface of a planar polymer chip. These elements are relevant for the manufacturing of complex integrated-optical components. The optical and functional properties of the integrated-optical waveguides have been characterized.