Micro Electrochemical Machining of 3D Micro Structure Using Dilute Sulfuric Acid

Micro electrochemical machining (ECM) using ultra short pulses with tens of nanosecond duration is presented. 0.1 M sulfuric acid was used as electrolyte and 3D micro structures were machined on stainless steel. To prevent taper, a disk-type electrode was introduced. Using the disk-type electrode, taper could be eliminated. To improve productivity, multiple electrodes were applied and multiple structures were machined simultaneously. Since the wear of tool electrode is negligible in ECM, micro wire can be used as tool electrode. Using a platinum wire electrode with 10 urn diameter, various 3D features were machined on stainless steel plate.