Title of article
A Laser Doppler Interferometric System for Measuring Motion of Vibrating Combs
Author/Authors
Zhang، نويسنده , , G.X. and Zhong، نويسنده , , Y. and Hong، نويسنده , , X. F. Leng، نويسنده , , C.L. and Jiang، نويسنده , , C.Z. and Du، نويسنده , , Z.H. and Ouyang، نويسنده , , J.F.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
4
From page
491
To page
494
Abstract
Micro-Electro-Mechanical Systems have been growing rapidly over recent years. However, measurement of their motions is a difficult problem. A laser Doppler interferometric system for measuring motion characteristics of vibrating combs in MEMS is presented. The working principle and optical diagram of the system are explained. Some key challenges in the system design are discussed. The velocity, displacement, and frequency can be acquired by demodulating the phase-modulated Doppler signal and processing the data by software.
Keywords
Micro-electro-mechanical system , Measurement , motion
Journal title
CIRP Annals - Manufacturing Technology
Serial Year
2005
Journal title
CIRP Annals - Manufacturing Technology
Record number
2267310
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