Title of article
Metrology and Calibration of a Long Travel Stage
Author/Authors
Evans، نويسنده , , C. and Holmes، نويسنده , , M. and Demarest، نويسنده , , F. and Newton، نويسنده , , D. and Stein، نويسنده , , A.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
4
From page
495
To page
498
Abstract
Nine axes of displacement measuring interferometers (DMIs) provide feedback for the control of a six-degree of freedom stage with a work volume of 500 × 1 × 1 mm3. Four additional DMIs are used for straightness and squareness calibration. Even with correction for angular error motions, cosine errors combined with cyclic errors compromise straightness calibration with a moving mirror configuration. A Fizeau interferometer provides pitch and yaw measurement. Automatic cyclic error compensation is demonstrated.
Keywords
Metrology , Interferometry , Straightness
Journal title
CIRP Annals - Manufacturing Technology
Serial Year
2005
Journal title
CIRP Annals - Manufacturing Technology
Record number
2267313
Link To Document