A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-Machining

The importance of nano-machining processes is continually increasing in a wide range of industries. In particular, the demands for machining with stable nanometer order accuracy in a wide work area have recently increased in the electronics and automotive industries. In order to meet such industrial requirements, it is necessary to develop an ultraprecision machine tool based on a new design concept. Therefore, in this study, a novel linear motor-driven aerostatic planar motion table system was developed for nano-machining. The results of actual machining tests confirmed that the developed table system has a remarkable performance.