Feature-Oriented Measurement Strategy in Atomic Force Microscopy

In this paper a new measurement approach is presented; the probe is driven over the sample surface according to a feature-oriented measurement strategy, in order to scan with high resolution just the discrete features of interest. Such intelligent tip motion is made possible by re-programming of the actuation system through a software interface with the instrument control. This new approach optimizes the measurement operations, enabling the selection of higher resolutions where needed and allowing for considerable measurement time reduction. Furthermore, minimisation of the total scanned length allows a reduction of tip wear. The proposed method was tested on the characterization of complex microstructures. Results are discussed in terms of advantages and limitations in comparison to traditional raster scanning measurements.