Enhanced stress durability of nano resonators with scandium doped electrodes

To explore mechanical stress durability of thin aluminum–scandium (AlSc) films, 0.86 GHz nano resonators with AlSc electrodes have been manufactured. Four different samples have been prepared altering the Sc content in the alloy between 0.0% and 2.5%. A final lift-off step accomplished manufacture procedure of the devices. The resonators have been operated with heavy load to determine power durability. The resonators with AlSc electrodes show increased power durability compared to conventional Al metallized devices. Texture and grain structure of all films have been investigated by means of electron backscatter diffraction (EBSD) and atomic force microscopy (AFM). Material fatigue of electrodes has been visualized by scanning electron microscopy (SEM). The refined grain structure of these alloys can explain the enhanced mechanical stress durability of AlSc electrodes.