Understanding behavior of machining interface and dielectric molecular medium in nanoscale electro-machining

Recently, a repeatable and scalable nanoscale electro-machining (nano-EM) process to produce sub-20 nm scale features has been demonstrated. In the presented research, the behavior of the liquid dielectric (n-decane) machining medium in nano-confinement (<3 nm) under physical boundary conditions is investigated using molecular dynamics (MD) simulation. Results show a four-fold increase in the density of n-decane indicating ‘quasi-solid’ behavior at the nano-EM interface, thereby acting as an effective charge transport medium between the nano-tool and the workpiece. The effect of such quasi-solid medium is demonstrated through the experimental observations of electrical breakdown (BD) at the sub-20 nm scale interface.