New concept of a 3D-probing system for micro-components

The results of a feasibility study with the aim to demonstrate the applicability of a Fizeau interferometer for tactile dimensional metrology are presented. The concept is based on a Fizeau interferometer for detecting the deflection of an internal measuring plane at which the probing stylus is attached. The mechanical setup is dimensioned for small probing forces and an isotropic probing behaviour. Results and experience during building up the probing system and evaluating the interference images are presented. Furthermore, the advantages and disadvantages of the new 3D-probing concept with a theoretical resolution of 0.1 μm (X-/Y-direction) and 0.04 μm (Z-direction) are discussed.